S.P C, C.S W. Coating of Titanium Nitride Thin Film on Stainless Steel Using an RF Planar Coil Inductively Coupled Plasma. Malaysian J. Sci. [Internet]. 2002 Apr. 25 [cited 2024 Nov. 22];21(1&2):107-13. Available from: https://mjs.um.edu.my/index.php/MJS/article/view/8596