Ibrahim Mitani, Sufian Mousa. “Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation”. Malaysian Journal of Science 24, no. 1 (June 30, 2005): 88. Accessed May 19, 2024. https://mjs.um.edu.my/index.php/MJS/article/view/17173.