Mohamed, Norani Muti, and Chee, Kin Yin. “Preparation and Surface Analysis of Ultrathin Photoresist for Microlithography”. Malaysian Journal of Science 21 (December 26, 2002): 141–146. Accessed November 22, 2024. https://mjs.um.edu.my/index.php/MJS/article/view/8877.