IBRAHIM MITANI, S. M. Amorphous Silicon (a-Si:H)/Silicon Nitride (a-SiNx:H) Superlattice by D.C Plasma Enhanced Chemical Vapour Deposition: Preparation and Characterisation. Malaysian Journal of Science, [S. l.], v. 24, n. 1, p. 88, 2005. Disponível em: https://mjs.um.edu.my/index.php/MJS/article/view/17173. Acesso em: 19 may. 2024.