S.P, Chew, and Wong C.S. “Coating of Titanium Nitride Thin Film on Stainless Steel Using an RF Planar Coil Inductively Coupled Plasma”. Malaysian Journal of Science 21, no. 1&2 (April 25, 2002): 107–113. Accessed May 19, 2024. http://mjs.um.edu.my/index.php/MJS/article/view/8596.