TAN, K.; MUHAMAD, M. The bonding modes and optical characteristics of annealed silicon oxide thin films prepared by plasma enhanced CVD. Malaysian Journal of Science, [S. l.], v. 16, n. 2, p. 13–16, 2017. Disponível em: http://mjs.um.edu.my/index.php/MJS/article/view/4787. Acesso em: 19 may. 2024.